Shaft Diameter
004
005
006
A
4
5
B
76.5
E
0.5Dp.X10Lg
F
15
Model Number
VGSSL
NN
Torque capacity [kg¡¤ cm]
5.5
6.1
Degree of vacuum pressure Pa
10-6
Leakage rate[Pa¡¤m3/sec]
<10-12
Pressure capacity [kg/cm2]
2.5
Temperature rate[¡æ]
-10¡«90 (Adding water cooling structure if it is beyond this temperature range.)
Gas compatibility
Inert Gas
Bearing type
686