Shaft Diameter
006
010
A
6
10
C
97.5
119.5
B
57.5
69.5
D
M32X1.5
M38X1.5
E
0.5Dp.X12Lg(flat)
3WX1.8Dp.X14Lg
F
20
25
J
55
60
K
P
49
Model Number
VGSNL
NN
¡¡
VGSNF
Torque capacity [kg¡¤cm]
9.2
59
Degree of vacuum pressure [Pa]
Leakage rate[Pa¡¤m3/sec]
<10-12
Pressure capacity (static) [kg/cm2]
Temperature range [¡æ]
-10¡«90(Adding water cooling structure if it is beyond this temperature range.)
Gas compatibility
Inert
Reactive
Beating type
627
6001