|
|
Vacuum Feedthroughs
|
|
|
|
Shaft Diameter
|
006
|
010
|
012
|
020
|
|
A
|
6
|
10
|
12
|
20
|
|
C
|
97.5
|
119.5
|
133.5
|
151.5
|
|
B
|
57.5
|
69.5
|
73.5
|
81.5
|
|
D
|
38
|
44
|
48
|
63
|
|
E
|
0.5Dp.X12Lg(flat)
|
3WX1.8Dp.X14Lg
|
4WX2.5Dp.X20Lg
|
6WX3.5Dp.X25Lg
|
|
F
|
20
|
25
|
30
|
35
|
|
J
|
80
|
80
|
90
|
105
|
|
K
|
10
|
10
|
10
|
10
|
|
L
|
18
|
24
|
27
|
31
|
|
N
|
PD60/4-§¶10
|
PD60/4-§¶10
|
PD70/4-§¶10
|
PD85/4-§¶10
|


| Model
Number
|
VGSFL
006
NN |
VGSFF
006
NN |
VGSFL
010
NN |
VGSFF
010
NN |
VGSFL
012
NN |
VGSFF
012
NN |
VGSFL
020
NN |
VGSFF
020
NN |
| Torque
capacity [kg¡¤ cm]
|
9.2 |
9.2
|
59
|
59
|
118 |
118
|
584
|
584
|
| Degree
of vacuum pressure Pa
|
10-6 |
| Leakage
rate (He)[Pa¡¤m3/sec]
|
<10-12
|
|
Pressure
capacity (static) [kg/cm2]
|
2.5 |
| Temperature
rage[¡æ]
|
-10¡«90 (Adding water cooling structure if it is beyond this temperature range.)
|
| Gas
compatibility
|
Inert
|
Reactive
|
Inert
|
Reactive
|
Inert
|
Reactive
|
Inert
|
Reactive
|
| Bearing
type
|
627 |
627
|
6001
|
6001
|
6002 |
6002
|
6005
|
6005
|
|
|
|