|
|
Vacuum Feedthroughs
|
|
|
| Shaft Diameter |
020 |
025 |
030 |
040 |
050 |
| A |
20
|
25
|
30
|
40
|
50
|
| C |
255 |
288 |
321 |
357 |
406 |
| B |
135 |
138 |
141 |
157 |
166 |
| D |
85 |
95 |
105 |
125 |
140 |
| E(keyway
) |
6WX3.5DX50L |
7WX4DX63L |
10WX5DX80L |
6WX3.5DX90L |
14WX5.5DX110L |
| F |
60 |
75 |
90 |
100 |
120 |
| J |
145 |
160 |
160 |
185 |
210 |
| K |
18 |
18 |
20 |
22 |
24 |
| L |
48 |
50 |
50 |
55.5 |
59.5 |
| M |
29 |
29 |
29 |
33 |
33 |
| N |
PD120/6-§¶12 |
PD135/6-§¶12 |
PD135/6-§¶12 |
PD160/8-§¶12 |
PD185/8-§¶12 |


| Mode
Number
|
VGSFL
020
WH |
VGSFL
025
WH |
VGSFL
030
WH |
VGSFL
040
WH |
VGSFL
050
WH |
| Torque capacity[kg¡¤cm] |
585 |
1013 |
1621 |
3242 |
5801 |
| Degree
of vacuum pressure Pa
|
10-6 |
| Leakage
rate (He)[Pa¡¤m3/sec]
|
<10-12 |
| Pressure capacity [kg/cm2] |
2.5 |
| Temperature range[¡æ] |
-10¡«90 (Adding water cooling structure if it is beyond this temperature range.) |
| Inert Gas |
Inert
gas |
| Bearing type |
7206
6205 |
7207
6206 |
7208
6207 |
7210
6209 |
7212
6211 |
|
|
|