vacuum feedthroughs

ferrofluid

ferrofluid

vacuum feedthroughs

vacuum feedthroughs ferrofluid vacuum feedthroughs ferrofluid vacuum feedthroughs  FerrofluidVacuum feedthroughs
vacuum feedthroughs ferrofluid vacuum feedthrough
ferrofluid vacuum feedthroughs vacuum
Vacuum Feedthroughs
Solid sealed gearing Hollow shaft sealed gearing Multiaxial sealed gearing Semiconducter sealed gearing
Shaft Diameter
004 005 006
A 4 5 6
B 76.5 76.5 76.5
E 0.5Dp.X10Lg 0.5Dp.X10Lg 0.5Dp.X10Lg
F 15 15 15




Model Number

VGSML

004

NN

VGSML

005

NN

VGSML

006

NN

Torque capacity [kg¡¤cm]

5.5

6.1

6.1

Degree of vacuum pressure Pa

10-6 

Leakage rate (He)[Pa¡¤m3/sec]

<10-12

Pressure capacity [kg/cm2]

2.5

Temperature rate [¡æ]

-10¡«90
(Adding water cooling structure if it is beyond this temperature range.)

Gas compatibility

Inert Gas

Bearing type

686

686

686



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