Model Number
VGSML
004
NN
005
006
Torque capacity [kg¡¤cm]
5.5
6.1
Degree of vacuum pressure Pa
10-6
Leakage rate (He)[Pa¡¤m3/sec]
<10-12
Pressure capacity [kg/cm2]
2.5
-10¡«90(Adding water cooling structure if it is beyond this temperature range.)
Gas compatibility
Inert Gas
Bearing type
686