Shaft Diameter	010	020	025	030	040	050	075
A	10	20	25	30	40	50	75
C	78	82.5	88	93	96	98	115
B	64	68.5	74	79	80	82	96
D	10	10	10	10	12	12	15
E	34	44	49	54	69	79	109
F	51	63	71	78	90	103	143
轴径ФG	10	20	25	30	40	50	75
J	90	105	120	120	145	160	210
K	10	10	10	10	10	12	12
L	20	22.5	26	27	27	26.5	33
N	PD70/4-Ф10	PD85/4-Ф10	PD100/4-Ф10	PD100/4-Ф10	PD120/4-Ф12	PD135/4-Ф12	PD185/4-Ф12

Model Number	VGHFL 010 NN	VGHFL 020 NN	VGHFL 025 NN	VGHFL 030 NN	VGHFL 040 NN	VGHFL 050 NN	VGHFL 075 NN
Torque capacity [kg· cm]	--
Degree of vacuum pressure Pa	10-6
Leakage rate (He)[Pa· m3/sec]	<10-12
Pressure capacity (static) [kg/cm2]	2.5
Temperature range[℃]	-10～90 (Adding water cooling structure if it is beyond this temperature range.)
Gas compatibility	Inert Gas
Bearing type	16003	6906	6907	6908	6910	6912	6918