■ cantilever structure   ■ flange link   ■ hollow structure

Shaft Diameter	020	025	030	040	050
A	20	25	30	40	50
B	123.5	126	130.5	141	147.5
C	109.5	112	116.5	125	131.5
D	10	10	10	12	12
E	44	49	54	69	79
F	78	90	96	106	132
轴径ФG	20	25	30	40	50
J	120	145	145	160	185
K	10	10	10	12	12
L	14.5	13	14	12	12.5
N	PD100/4-Ф10	PD120/4-Ф10	PD120/4-Ф10	PD135/4-Ф12	PD160/8-Ф12

Model Number	VGHFL 020 NN	VGHFL 025 NN	VGHFL 030 NN	VGHFLF 040 NN	VGHFL 050 NN
Torque capacity [kg· cm]	--
Degree of vacuum pressure Pa	10-6
Leakage rate (He)[Pa· m3/sec]	<10-12
Pressure capacity (static) [kg/cm2]	2.5
Temperature range [℃]	-10～90 (Adding water cooling structure if it is beyond this temperature range.)
Gas compatibility	Reactive Gas
Bearing type	7206	7207	7208	7210	7212