ferrofluid

vacuum feedthroughs

Vacuum Feedthroughs

Solid sealed gearing

Hollow shaft sealed gearing

Multiaxial sealed gearing

Semiconducter sealed gearing

Three Axis Type

Model Number VGCFL200NN

Degree of vacuum pressure Pa 10^-6

Leakage rate (He) [Pa·m³/sec] <10^-12

Pressure capacity [kg/cm²] 2.5

Temperature range [℃] -10～90
(Adding water cooling structure if it is beyond this temperature range.)

Gas compatibility Inert Gas

Bearing type (out)6840

(in)6906

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